Radioelektronikos terminų žodynas. – Vilnius : BĮ UAB „Litimo“. Kazimieras Gaivenis, Gytis Juška, Vidas Kalesinskas. 2000.
Silicon nitride — Preferred IUPAC name Silicon nitride … Wikipedia
Siliziumnitridmaske — silicio nitrido kaukė statusas T sritis radioelektronika atitikmenys: angl. silicon nitride mask vok. Siliziumnitridmaske, f rus. маска из нитрида кремния, f pranc. masque en nitrure de silicium, m … Radioelektronikos terminų žodynas
masque en nitrure de silicium — silicio nitrido kaukė statusas T sritis radioelektronika atitikmenys: angl. silicon nitride mask vok. Siliziumnitridmaske, f rus. маска из нитрида кремния, f pranc. masque en nitrure de silicium, m … Radioelektronikos terminų žodynas
silicio nitrido kaukė — statusas T sritis radioelektronika atitikmenys: angl. silicon nitride mask vok. Siliziumnitridmaske, f rus. маска из нитрида кремния, f pranc. masque en nitrure de silicium, m … Radioelektronikos terminų žodynas
маска из нитрида кремния — silicio nitrido kaukė statusas T sritis radioelektronika atitikmenys: angl. silicon nitride mask vok. Siliziumnitridmaske, f rus. маска из нитрида кремния, f pranc. masque en nitrure de silicium, m … Radioelektronikos terminų žodynas
LOCOS — LOCOS, short for LOCal Oxidation of Silicon, is a microfabrication process where silicon dioxide is formed in selected areas on a silicon wafer having the Si SiO2 interface at a lower point than the rest of the silicon surface.This technology was … Wikipedia
Etching (microfabrication) — Etching tanks used to perform Piranha, Hydrofluoric acid or RCA clean on 4 inch wafer batches at LAAS technological facility in Toulouse, France Etching is used in microfabrication to chemically remove layers from the surface of a wafer during… … Wikipedia
Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… … Wikipedia
materials science — the study of the characteristics and uses of various materials, as glass, plastics, and metals. [1960 65] * * * Study of the properties of solid materials and how those properties are determined by the material s composition and structure, both… … Universalium
Thermal oxidation — In microfabrication, thermal oxidation is a way to produce a thin layer of oxide (usually silicon dioxide) on the surface of a wafer (semiconductor). The technique forces an oxidizing agent to diffuse into the wafer at high temperature and react… … Wikipedia
